http://ir-heater-warm-max.com/zh/tags/%E6%B0%B4%E5%88%86%E6%B9%BF%E5%BA%A6/ Recent content in 水分；湿度 on Maximum Warmth Infrared Heaters Hugo zh Sat, 06 Jun 2026 01:18:14 +0800 http://ir-heater-warm-max.com/zh/posts/wafer-moisture-removal-heater-lamp/ Sat, 06 Jun 2026 01:18:14 +0800 http://ir-heater-warm-max.com/zh/posts/wafer-moisture-removal-heater-lamp/ <p><img src="http://ir-heater-warm-max.com/images/0a976f8a438e1a813cc995e9355a4471.png" alt="晶圆除湿加热灯"></p> <p>在晶圆制造车间，晶圆表面的水分不会静止不动。它会影响光刻胶的轮廓，扰乱关键尺寸，并产生无法返工的缺陷。在光刻和光刻胶处理过程中，软烘和硬烘不仅仅是加热循环——它们是水分抽除过程，同时决定良率。</p>